| EMA-ID | CRISP |
| Manufacturer | Zeiss |
| Model | XB 1540 |
| Category | Focused Ion Beam (FIB) |
| Location | D.UG2.12 |
| Lab phone | 8145 |
More Info:
Focused Ion Beam microscope; Cryo-stage / -transfer system; Imaging resolution 1 nm (SEM) / 7 nm (FIB); Raith Lithography System; SE2 / Inlense / BSE-detector; EBSD camera; EDX System
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